US Patent Issued to Applied Materials on May 26 for "System and method for non-invasive sensing of radio-frequency current spectra flowing in a plasma processing chamber" (Irish Inventors)

ALEXANDRIA, Va., May 26 -- United States Patent no. 12,638,485, issued on May 26, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"System and method for non-invasive sensing of radio-frequency current spectra flowing in a plasma processing chamber" was invented by David Gahan (Terenure, Ireland) and Paul Scullin (Lucan, Ireland).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system for non-invasive sensing of radio-frequency current spectra. In one example, the system comprises a plasma processing chamber, a plasma generator, and a shunt connector having a resistor therein. In one example, the shunt connector is attached across an opening in a ground-return path between the chamber and the gen...