US Patent Issued to Applied Materials on May 26 for "Microwave resonator array for plasma diagnostics" (California Inventors)

ALEXANDRIA, Va., May 26 -- United States Patent no. 12,640,352, issued on May 26, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Microwave resonator array for plasma diagnostics" was invented by David John Peterson (San Jose, Calif.) and Chuang-Chia Lin (San Ramon, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include sensor devices and methods of using the sensor devices. In an embodiment, a sensor device comprises a substrate, a support extending up from the substrate, and a resonator mechanically coupled to the support. In an embodiment, the sensor device further comprises an antenna that is configured to electromagnetically couple with the resonator, w...