US Patent Issued to Applied Materials on May 19 for "Gas distribution assemblies for semiconductor devices" (California Inventors)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,633,501, issued on May 19, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Gas distribution assemblies for semiconductor devices" was invented by Sanjeev Baluja (Campbell, Calif.), Chaowei Wang (San Diego), Kevin Griffin (Livermore, Calif.), Kenneth Brian Doering (San Jose, Calif.), Hanhong Chen (Milpitas, Calif.) and Joseph AuBuchon (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Gas distribution assemblies for semiconductor devices are described. The gas distribution assemblies include a backplate, a faceplate, a counterbored hole, and at least one orifice. The at least one orifice includes, for example, at least one str...