US Patent Issued to Applied Materials on May 12 for "Processing methods and cluster tools for forming semiconductor devices" (California, Texas Inventors)

ALEXANDRIA, Va., May 12 -- United States Patent no. 12,628,604, issued on May 12, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Processing methods and cluster tools for forming semiconductor devices" was invented by Benjamin Colombeau (San Jose, Calif.), Balasubramanian Pranatharthiharan (San Jose, Calif.), Lequn Liu (San Jose, Calif.) and Brian K. Kirkpatrick (Allen, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "Semiconductor devices (e.g., GAA device structures) and processing methods and cluster tools for forming GAA device structures are described. The cluster tools for forming GAA device structures comprise a first etch chamber, a second etch chamber, and a third etch chamber. Ea...