US Patent Issued to Applied Materials on March 31 for "Methods, systems, and apparatus for conducting a radical treatment operation prior to conducting an annealing operation" (California Inventors)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,593,666, issued on March 31, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Methods, systems, and apparatus for conducting a radical treatment operation prior to conducting an annealing operation" was invented by Pradeep Sampath Kumar (San Jose, Calif.), Norman L. Tam (Cupertino, Calif.), Dongming Iu (Union City, Calif.), Shashank Sharma (Fremont, Calif.), Eric R. Rieske (Livermore, Calif.) and Michael P. Kamp (San Ramon, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Aspects of the present disclosure relate to methods, systems, and apparatus for conducting a radical treatment operation on a substrate prior to conducting an annea...