ALEXANDRIA, Va., March 31 -- United States Patent no. 12,593,643, issued on March 31, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Batch thermal process chamber" was invented by Adel George Tannous (Santa Clara, Calif.), Schubert S. Chu (San Francisco), Shu-Kwan Lau (Sunnyvale, Calif.), Kartik Bhupendra Shah (Saratoga, Calif.), Zuoming Zhu (Sunnyvale, Calif.), Ala Moradian (Sunnyvale, Calif.), Surajit Kumar (San Jose, Calif.), Srinivasa Rangappa (Bangalore, India), Chia Cheng Chin (Fremont, Calif.) and Vishwas Kumar Pandey (Madhya Pradesh, India).
According to the abstract* released by the U.S. Patent & Trademark Office: "A batch processing chamber and a process kit for use therein are provided. The process kit includes ...