US Patent Issued to Applied Materials on March 3 for "Optical cable for interferometric endpoint detection" (California Inventors)

ALEXANDRIA, Va., March 3 -- United States Patent no. 12,567,569, issued on March 3, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Optical cable for interferometric endpoint detection" was invented by Lei Lian (Fremont, Calif.) and Pengyu Han (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed herein is an endpoint detection having an optical bundle configured to emit light through a ceiling of a processing chamber. The optical bundle has a plurality of fibers configured to transmit the light from a light source towards a substrate and is configured to receive light reflected from the substrate. The plurality of fibers include a first emitting fiber and a first recei...