US Patent Issued to Applied Materials on March 3 for "High-power density RF remote plasma source apparatus" (California Inventors)

ALEXANDRIA, Va., March 3 -- United States Patent no. 12,567,561, issued on March 3, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"High-power density RF remote plasma source apparatus" was invented by Mehran Moalem (Fremont, Calif.) and Kartik Ramaswamy (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include a plasma source. In an embodiment, the plasma source includes a plurality of plasma legs connected to each other by corner connectors. In an embodiment, each plasma leg comprises a conductive shell, a magnetic layer around the conductive shell, and a primary coil in the magnetic layer."

The patent was filed on July 27, 2022, under Application...