ALEXANDRIA, Va., March 3 -- United States Patent no. 12,566,660, issued on March 3, was assigned to Applied Materials Inc (Santa Clara, Calif.).
"Guardbands in substrate processing systems" was invented by Jimmy Iskandar (Fremont, Calif.), Fei Li (Cincinnati) and James Robert Moyne (Canton, Mich.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes identifying trace data including a plurality of data points, the trace data being associated with production, via a substrate processing system, of substrates having property values that meet threshold values. The method further includes determining, based on a guardband, guardband violation data points of the plurality of data points of the trace data...