US Patent Issued to Applied Materials on March 3 for "Bimetallic faceplate for substrate processing" (Indian, American Inventors)

ALEXANDRIA, Va., March 3 -- United States Patent no. 12,565,704, issued on March 3, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Bimetallic faceplate for substrate processing" was invented by Gaurav Shrivastava (Bengaluru, India), Pavankumar Ramanand Harapanhalli (Bangalore, India), Sudhir R. Gondhalekar (Fremont, Calif.), Yao-Hung Yang (Santa Clara, Calif.) and Chih-Yang Chang (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A bimetallic faceplate for substrate processing is provided including a plate having a plurality of gas distribution holes and formed of a first metal having a first coefficient of thermal expansion, the plate having at least one groove around a cent...