ALEXANDRIA, Va., March 3 -- United States Patent no. 12,568,795, issued on March 3, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Assembled grid tray" was invented by Shinobu Abe (Osaka, Japan), Chang Hee Shin (Milpitas, Calif.), Shinichi Kurita (San Jose, Calif.) and Masahiko Kowaka (Osaka, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An assembled grid tray is disclosed, comprising a frame for holding multiple substrate trays to form a larger tray for use in a semiconductor processing tool. The frame may be comprised of two outer frame members that hold one or more of the trays, each with a magnet rail use with a maglev system. The frame may be further comprised of an inner frame me...