US Patent Issued to APPLIED MATERIALS on March 24 for "Plate assemblies, process kits, and processing chambers for semiconductor manufacturing" (American, Indian Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,584,218, issued on March 24, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Plate assemblies, process kits, and processing chambers for semiconductor manufacturing" was invented by Ala Moradian (Sunnyvale, Calif.) and Manjunath Subbanna (Bangalore, India).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the present disclosure relate to plate assemblies, process kits, processing chambers, and related components and methods for semiconductor manufacturing. In one implementation, a plate assembly for disposition in a processing chamber includes an inner section that includes an opaque material. The inner section has an outer di...