ALEXANDRIA, Va., March 24 -- United States Patent no. 12,586,764, issued on March 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Plasma showerhead treatment methods" was invented by Hanhong Chen (Milpitas, Calif.), Zhejun Zhang (Santa Clara, Calif.) and Chi-Chou Lin (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Methods of treating a plasma showerhead comprise placing a showerhead comprising a faceplate and a plurality of gas openings PECVD substrate processing chamber having a process volume between the substrate support and the faceplate, and then exposing the showerhead to a silicon-containing precursor and a reactant gas so that the process volume and the gas opening...