US Patent Issued to Applied Materials on March 24 for "Multi-port cross flow system" (Indian, American Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,586,767, issued on March 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Multi-port cross flow system" was invented by Rupankar Choudhury (Agartala, India), Sanjay G. Kamath (Fremont, Calif.), Juan Carlos Rocha-Alvarez (San Carlos, Calif.), Sridhar Bachu (Hyderabad, India), Mukesh Singh Dhami (Lucknow, India) and Dan-il Yoon (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A processing chamber and port adaptor are provided. Processing chambers include a chamber body having a lid coupled to the first end of the chamber body, a gas ring adjacent the first end of the chamber body, and a substrate support, where a process...