US Patent Issued to Applied Materials on March 24 for "Methods for controlling pulse shape in ALD processes" (California Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,584,219, issued on March 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Methods for controlling pulse shape in ALD processes" was invented by Joseph AuBuchon (San Jose, Calif.), Kevin Griffin (Livermore, Calif.) and Hanhong Chen (Milpitas, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods for controlling pulse shape in ALD processes improves local non-uniformity issues of films deposited on substrate surface. The methods include using a variable flow valve creating predetermined pulse shape when a reactant is provided on a substrate surface."

The patent was filed on July 27, 2023, under Application No. 18/227,058.

*For...