US Patent Issued to Applied Materials on March 17 for "Temperature and bias control of edge ring" (California Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,580,162, issued on March 17, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Temperature and bias control of edge ring" was invented by James Rogers (Los Gatos, Calif.), Linying Cui (Cupertino, Calif.) and Rajinder Dhindsa (Pleasanton, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments described herein provide methods and apparatus used to control a processing result profile proximate to a circumferential edge of a substrate during the plasma-assisted processing thereof. In one embodiment, a substrate support assembly features a first base plate and a second base plate circumscribing the first base plate. The first and sec...