US Patent Issued to Applied Materials on March 17 for "Plasma showerhead assembly and method of reducing defects" (California Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,580,159, issued on March 17, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Plasma showerhead assembly and method of reducing defects" was invented by Rohit Ode (Morgan Hill, Calif.), Sanjeev Baluja (Campbell, Calif.), Kenneth Brian Doering (San Jose, Calif.), Kevin Griffin (Livermore, Calif.) and Hanhong Chen (Milpitas, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Plasma showerhead assemblies are disclosed comprising a conductive plate having a plurality of the conductive plate gas openings, a dielectric faceplate having a thickness and a plurality of dielectric faceplate gas openings extending through the dielectric faceplate...