US Patent Issued to Applied Materials on March 17 for "Methods for selective molybdenum deposition" (California Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,577,655, issued on March 17, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Methods for selective molybdenum deposition" was invented by Avgerinos V. Gelatos (Scotts Valley, Calif.), Thomas Empante (Santa Clara, Calif.) and Yang Hu (Sunnyvale, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and apparatus for selectively depositing a molybdenum layer on a substrate which includes contacting a substrate surface initially comprising a first portion comprising amorphous silicon, and a second portion comprising silicon and germanium with a molybdenum precursor to selectively form a molybdenum layer on the second portion of the ...