US Patent Issued to Applied Materials on June 9 for "Modular microwave plasma source" (California Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,651,727, issued on June 9, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Modular microwave plasma source" was invented by Philip Allan Kraus (San Jose, Calif.) and Thai Cheng Chua (Cupertino, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments include a modular microwave source. In an embodiment, the modular microwave source comprises a voltage control circuit, a voltage controlled oscillator, where an output voltage from the voltage control circuit drives oscillation in the voltage controlled oscillator. The modular microwave source may also include a solid state microwave amplification module coupled to the voltage contro...