US Patent Issued to Applied Materials on June 9 for "Cross flow gas delivery for particle reduction" (American, Indian Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,651,731, issued on June 9, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Cross flow gas delivery for particle reduction" was invented by Dhritiman Subha Kashyap (Bangalore, India), Sanjeev Baluja (Campbell, Calif.), Chaowei Wang (San Diego), Amar Nath Nishad (Bangalore, India) and Robert B. Moore (Bigfork, Mont.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Gas distribution apparatus comprising a backing plate and faceplate, and methods of use are described. The backing plate has a peripheral channel with a plurality of inwardly angled inlet channels extending from the peripheral channel to the front surface of the backing plate. The pl...