US Patent Issued to Applied Materials on June 30 for "Treatment chamber with modular microwave power delivery" (American, French Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,671,061, issued on June 30, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Treatment chamber with modular microwave power delivery" was invented by Timothy Joseph Franklin (Campbell, Calif.), Sajad Yazdani (Fremont, Calif.), Kostiantyn Achkasov (Lyons, France) and Xue Yang Chang (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein include a source array. In an example, a source array includes a dielectric plate having a surface. A plurality of resonators is on the surface of the dielectric plate. The source array also includes a plurality of power amplifiers. Each one of the plurality of power amp...