US Patent Issued to Applied Materials on June 30 for "Pump liner for process chamber" (California Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,668,876, issued on June 30, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Pump liner for process chamber" was invented by Muhannad Mustafa (Milpitas, Calif.) and Sanjeev Baluja (Campbell, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the present disclosure are related to directed to a pump liner for a process chamber. The pump liner is aligned with particular components in the process chamber so that there is an upper gap and a lower gap between the pump liner and the particular processing chamber components (e.g., an edge ring). The pump liner advantageously reduces side to side variation in temperature and gas f...