US Patent Issued to Applied Materials on June 30 for "Low pressure lift pin cavity hardware" (California Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,671,063, issued on June 30, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Low pressure lift pin cavity hardware" was invented by Michael Thomas Nichols (Sunnyvale, Calif.), Imad Yousif (San Jose, Calif.), John Anthony O'Malley III (San Jose, Calif.) and Steven E. Babayan (Los Altos, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments disclosed herein generally relate to a pumping system for a plasma processing apparatus. The pumping system includes a first pump path, a second pump path, a first valve, and a second valve. The first pump path couples an opening of a substrate support assembly of the processing chamber to an ...