ALEXANDRIA, Va., July 16 -- United States Patent no. 12,668,874, issued on June 30, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Liquid precursor recovery module" was invented by Shashank Sharma (Chhattisgarh, India).
According to the abstract* released by the U.S. Patent & Trademark Office: "Vapor deposition precursor recovery systems and methods are provided. Methods and systems include a precursor container housing a precursor material and a carrier gas container housing a carrier gas. Systems and methods include a condenser assembly having a condenser in fluid connection with an exhaust line, a recycled precursor container, and a cooling circuit. Systems and methods include a vaporizer having one or more inlets in fl...