US Patent Issued to Applied Materials on June 30 for "Apparatus and methods for heating tunability in processing chambers" (California Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,669,677, issued on June 30, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Apparatus and methods for heating tunability in processing chambers" was invented by Ala Moradian (Sunnyvale, Calif.), Saurabh Chopra (Santa Clara, Calif.) and Lori D. Washington (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments herein are generally directed to electronic device manufacturing and, more particularly, to systems and methods for lamp heating in thermal processing chambers. In one embodiment, a substrate processing chamber includes a lid, a floor, and a processing volume between the lid and the floor. An upper window is disp...