US Patent Issued to Applied Materials on June 23 for "Surface treatment method to remove contaminated and implanted waveguide surface" (California Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,662,650, issued on June 23, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Surface treatment method to remove contaminated and implanted waveguide surface" was invented by Wei Wu (Santa Clara, Calif.), Jhenghan Yang (San Jose, Calif.), Yongmei Chen (San Jose, Calif.), Jinxin Fu (Fremont, Calif.) and Ludovic Godet (Sunnyvale, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the present disclosure herein include a method of removing a contamination material from an optical device. The method may include disposing an optical device in a process chamber, the optical device having optical device structures formed in a subs...