ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,456, issued on June 23, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"In-situ electric field detection method and apparatus" was invented by Yue Guo (Redwood City, Calif.), Yang Yang (San Diego), Kartik Ramaswamy (San Jose, Calif.), Fernando Silveira (Santa Clara, Calif.) and A N M Wasekul Azad (Santa Clara, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed herein is an electric field measurement system that includes a light source, a light sensor configured to receive electromagnetic energy transmitted from the light source, an electro-optic sensor, and a controller. The electro-optic sensor include a package comprisi...