US Patent Issued to Applied Materials on July 7 for "System for processing a substrate in cleaning modules" (American, Indian Inventors)

ALEXANDRIA, Va., July 7 -- United States Patent no. 12,673,431, issued on July 7, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"System for processing a substrate in cleaning modules" was invented by Jagan Rangarajan (San Jose, Calif.), Edward Golubovsky (San Jose, Calif.), Edwin Valazquez (San Jose, Calif.), Adrian S. Blank (Gilroy, Calif.), Steven M. Zuniga (Soquel, Calif.) and Balasubramaniam C. Jagannathan (Bangalore, India).

According to the abstract* released by the U.S. Patent & Trademark Office: "Equipment is used in the manufacturing of electronic devices, and more particularly, to a cleaning system, cleaning system hardware and related methods which may be used to transport and clean the surface of a substrate. A...