ALEXANDRIA, Va., July 7 -- United States Patent no. 12,677,630, issued on July 7, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Identifying and weighing carriers in a substrate processing system" was invented by Bhaskar Prasad (Adityapur, India), Thomas Brezoczky (Los Gatos, Calif.), Kirankumar Neelasandra Savandaiah (Bangalore, India) and Michael Richter (Santa Clara, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method and apparatus for identifying of a carrier of a group of carriers within a substrate processing system, wherein the carriers are conveyed by magnetic levitation through the substrate processing system. The carrier may be identified, for example, using an identifica...