US Patent Issued to Applied Materials on July 28 for "Multi-zone heater with minimum RF loss" (American, Indian Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,695,070, issued on July 28, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Multi-zone heater with minimum RF loss" was invented by Jian Li (Fremont, Calif.), Edward P. Hammond (Hillsborough, Calif.), Vidyadharan Srinivasamurthy (Bengaluru, India) and Juan Carlos Rocha-Alvarez (San Carlos, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Exemplary substrate support assemblies may include an electrostatic chuck body defining a substrate support surface that defines a substrate seat. The substrate support assemblies may include a support stem coupled with the electrostatic chuck body. The substrate support assemblies may include an upp...