US Patent Issued to Applied Materials on July 28 for "Methods and mechanisms for process recipe optimization" (California Inventor)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,693,652, issued on July 28, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Methods and mechanisms for process recipe optimization" was invented by Robert C. Pack (Morgan Hill, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electronic device manufacturing system configured to performing, by manufacturing equipment, a first process on a first substrate according to a process recipe, wherein the process recipe comprises a plurality of setting parameters. The system then generates metrology data associated with a plurality of features and inputs the metrology data into one or more Bayesian probabilistic models. The system then rece...