US Patent Issued to Applied Materials on July 28 for "Concentration sensor for precursor delivery system" (California Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,693,279, issued on July 28, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Concentration sensor for precursor delivery system" was invented by Vivek B. Shah (Santa Clara, Calif.), Varoujan Chakarian (North Hills, Calif.) and Upendra Ummethala (Cupertino, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "First sensor data indicative of a first mass flow rate of a first gas flowing to a vaporization chamber is received. The vaporization chamber includes a compound and is to transition the compound into a gaseous state. Second sensor data indicative of a second mass flow rate of a second gas including the compound and the first gas flow...