US Patent Issued to Applied Materials on July 21 for "Cleaning operations based on deposition thickness" (California Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,686,918, issued on July 21, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Cleaning operations based on deposition thickness" was invented by Victor Zamarian (Cupertino, Calif.), Mitesh Harshad Sanghvi (Dublin, Calif.), Venkatanarayana Shankaramurthy (San Jose, Calif.), Yuhyuk Cho (San Jose, Calif.) and Deepesh Rai (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes identifying deposition thickness property data associated with an amount of material deposited via one or more substrate processing operations of a process recipe performed in a processing chamber. The method further includes determining, bas...