US Patent Issued to Applied Materials on July 14 for "Semiconductor process equipment" (Indian, American, German Inventors)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,685,078, issued on July 14, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Semiconductor process equipment" was invented by Bhaskar Prasad (Adityapur, India), Thomas Brezoczky (Los Gatos, Calif.), Kirankumar Neelasandra Savandaiah (Bangalore, India), Mayank Dwivedi (Bangalore, India) and Alexander Sendobry (Muhltal, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A station for a substrate processing system that includes a magnetic levitation actuator assembly disposed in a first region of the station that is separated from a second region of the station by a membrane. The magnetic levitation actuator assembly is configured to cont...