ALEXANDRIA, Va., July 14 -- United States Patent no. 12,683,111, issued on July 14, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Dynamic ion beam shape selection" was invented by Richard Allen Sprenkle (South Hamilton, Mass.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Techniques to dynamically tune components of an ion implanter are described. A method includes generating a first histogram for a first setting parameter of an ion implanter and a second histogram for a second setting parameter of the ion implanter. The histograms comprise a graphical representation of a distribution of data points across a range of values for each setting parameter. The method includes presenting the histo...