US Patent Issued to Applied Materials on Feb. 24 for "Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools" (Indian, American, German Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,564,012, issued on Feb. 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools" was invented by Gayatri Natu (Mumbai, India), Geetika Bajaj (Mumbai, India), Prerna Goradia (Mumbai, India), Darshan Thakare (Thane West, India), David Fenwick (Los Altos Hills, Calif.), XiaoMing He (Fremont, Calif.), Sanni Seppaelae (Karlstein am Main, Germany), Jennifer Sun (Fremont, Calif.), Rajkumar Thanu (Santa Clara, Calif.), Jeff Hudgens (San Francisco), Karuppasamy Muthukamatchy (Bangalore, India) and Arun Dhayalan (Austin, Texas).

According to the abstract* released by the U.S. Patent & Trademark...