US Patent Issued to Applied Materials on Feb. 24 for "Plenum driven hydroxyl combustion oxidation" (California Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,559,841, issued on Feb. 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Plenum driven hydroxyl combustion oxidation" was invented by Christopher S. Olsen (Fremont, Calif.), Sameh Helmy (Santa Clara, Calif.), Hansel Lo (San Jose, Calif.) and Eric Kihara Shono (San Mateo, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method and processing chamber for plenum driven hydroxyl combustion oxidation. A mixture is produced in a plenum. The mixture includes a first reactive gas injected from a first inlet and a second reactive gas injected from a second inlet. The mixture is injected towards a substrate of a processing chamber at a je...