US Patent Issued to Applied Materials on Feb. 24 for "Methods, systems, and apparatus for measuring a gap between a support surface for a substrate and an opposing upper surface of a processing chamber" (California Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,564,004, issued on Feb. 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Methods, systems, and apparatus for measuring a gap between a support surface for a substrate and an opposing upper surface of a processing chamber" was invented by Trung H. Dao (San Jose, Calif.), Sagir Bipin Kadiwala (Santa Clara, Calif.), Sam Kim (San Jose, Calif.), Minh Quoc Tran (Gilroy, Calif.) and Gu Liu (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods, systems, and apparatus for measuring a gap between a support surface for a substrate and an opposing upper surface of a processing chamber. The methods comprise: disposing a sensor...