US Patent Issued to Applied Materials on Feb. 24 for "Apparatus and methods for self-assembled monolayer (SAM) deposition in semiconductor equipment" (California, Oregon Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,559,840, issued on Feb. 24, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Apparatus and methods for self-assembled monolayer (SAM) deposition in semiconductor equipment" was invented by Kevin Kashefi (Sam Ramon, Calif.), Joel Minster Huston (Los Gatos, Calif.), Michael Lee McSwiney (Scappoose, Ore.), Carmen Leal Cervantes (Mountain View, Calif.), Yongjin Kim (Santa Clara, Calif.), Drew William Phillips (San Jose, Calif.) and Mark Joseph Saly (Milpitas, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and apparatus for self-assembled monolayer (SAM) deposition are provided herein. In some embodiments, an apparatus for self-a...