US Patent Issued to APPLIED MATERIALS on Feb. 17 for "Methods for electrostatic chuck ceramic surfacing" (California Inventors)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,557,595, issued on Feb. 17, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Methods for electrostatic chuck ceramic surfacing" was invented by Ramesh Gopalan (Fremont, Calif.), Robert Toshiharu Hirahara (San Jose, Calif.), Stanley Wu (Santa Clara, Calif.), Michael Prestoza Decena (Hayward, Calif.), Wendell Boyd (Santa Clara, Calif.), Siamak Salimian (Los Altos, Calif.) and Thomas Brezoczky (Los Gatos, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and apparatus reduce chucking abnormalities for electrostatic chucks by ensuring proper planarizing of ceramic surfaces of the electrostatic chuck. In some embodiments, a method f...