US Patent Issued to Applied Materials on Aug. 25 for "Susceptor heat transfer" (California Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,030, issued on Aug. 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Susceptor heat transfer" was invented by Arvinder Manmohansingh Chadha (San Jose, Calif.), Syed Nazmul Ahsan (Folsom, Calif.) and Glen T Mori (Gilroy, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate support assembly including a shaft and a susceptor disposed on the shaft. The susceptor is configured to support a substrate in a processing chamber during a substrate processing operation. The substrate support assembly comprises cooling features configured to cool the susceptor at a cooling rate of greater than 2 degrees Celsius per minute subsequen...