US Patent Issued to Applied Materials on Aug. 25 for "Determining tilt angle of substrate structures utilizing angular fourier decomposition of scattering images" (California, Michigan Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,716,854, issued on Aug. 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Determining tilt angle of substrate structures utilizing angular fourier decomposition of scattering images" was invented by Alexander Buhse Brady (San Jose, Calif.), Tusar Ranjan Swain (San Jose, Calif.), Vlad Kudriashov (San Jose, Calif.) and Zhenhua Ge (South Lyon, Mich.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes receiving, by a processing device, a first small angle scattering image of a substrate. The substrate includes a number of structures oriented at a first angle relative to a base of the substrate. The first small angle scattering ...