US Patent Issued to Applied Materials on Aug. 25 for "Coating interior surfaces of complex bodies by atomic layer deposition" (California Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,716,128, issued on Aug. 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Coating interior surfaces of complex bodies by atomic layer deposition" was invented by Joseph Frederick Behnke (San Jose, Calif.), Carlaton Wong (Sunnyvale, Calif.), Albert Barrett Hicks III (Sunnyvale, Calif.), Steven Darrell Marcus (San Jose, Calif.), Joseph Frederick Sommers (Roseville, Calif.), Christopher Laurent Beaudry (San Jose, Calif.) and Timothy Joseph Franklin (Campbell, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes affixing a supply apparatus to inlets for one or more channels of a chamber component. The channels provide one...