US Patent Issued to Applied Materials on Aug. 25 for "Active linear motor parasitic force compensation" (California Inventor)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,717,250, issued on Aug. 25, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Active linear motor parasitic force compensation" was invented by Ulrich Mueller (Berkeley, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the present disclosure relate to a linear motor system and a digital lithography system having the linear motor system that compensates for potential parasitic forces applied to at least one stage of the digital lithography system during operation. The digital lithography system includes one or more motor coils disposed between an upper plate and a lower plate of a yoke of at least one track. The motor coi...