US Patent Issued to Applied Materials on Aug. 18 for "Vibration determination in substrate processing systems" (American, Indian Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,710,737, issued on Aug. 18, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Vibration determination in substrate processing systems" was invented by Zhi Wang (Redwood City, Calif.), Tao Zhang (San Ramon, Calif.), Punyabrahma Panda (Bangalore, India) and Michael Kutney (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method includes receiving, by a processing device, position error data from one or more motors of a process chamber. The method further includes performing preprocessing of the position error data. The method further includes transforming the position error data to a frequency domain. The method further in...