US Patent Issued to Applied Materials on Aug. 18 for "Radiation heating to dry moisture from air bearing shaft" (Massachusetts Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,151, issued on Aug. 18, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Radiation heating to dry moisture from air bearing shaft" was invented by Roger B. Fish (Bedford, Mass.) and Jeffrey E. Krampert (Topsfield, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system that reduces the amount of water that enters a process chamber via a movable shaft is disclosed. A ring heater is disposed around the shaft outside the process chamber proximate the air bearing. The ring heater includes a plurality of optical energy emitters arranged around the shaft. The wavelength emitted by the ring heater may be selected to align with the absor...