US Patent Issued to Applied Materials on Aug. 18 for "PEALD titanium nitride with direct microwave plasma" (California Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,712,155, issued on Aug. 18, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"PEALD titanium nitride with direct microwave plasma" was invented by Hanhong Chen (Milpitas, Calif.), Arkaprava Dan (San Jose, Calif.), Joseph AuBuchon (San Jose, Calif.), Kyoung Ha Kim (Cupertino, Calif.) and Philip A. Kraus (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of depositing titanium nitride is disclosed. Some embodiments of the disclosure provide a PEALD process for depositing titanium nitride which utilizes a direct microwave plasma. In some embodiments, the direct microwave plasma has a high plasma density and low ion energ...