US Patent Issued to Applied Materials on Aug. 11 for "Systems and methods for detecting a substrate in a chamber of a substrate processing system" (California Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,707,924, issued on Aug. 11, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Systems and methods for detecting a substrate in a chamber of a substrate processing system" was invented by Mingle Tong (San Jose, Calif.) and Siqing Lu (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods, systems, and apparatus are provided for detecting a substrate in a chamber of a substrate processing system. In some embodiments, the system may include a sensor system comprising: a light source configured to generate light; a first light guide fixed relative to the light source and having a light input and a light output offset from th...