US Patent Issued to Applied Materials on Aug. 11 for "Radiation heating to clean deposits from air bearing shaft" (Massachusetts Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,706,273, issued on Aug. 11, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Radiation heating to clean deposits from air bearing shaft" was invented by Roger B. Fish (Bedford, Mass.) and Jeffrey E. Krampert (Topsfield, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system that reduces the buildup of film on a movable shaft that enters and is retracted from a process chamber is disclosed. A ring heater is disposed around the shaft inside the process chamber proximate the air bearing. The ring heater includes a plurality of optical energy emitters arranged around the shaft. The wavelength emitted by the ring heater may be selected t...