US Patent Issued to Applied Materials on Aug. 11 for "Methods and assemblies for gas flow ratio control" (American, Indian Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,707,921, issued on Aug. 11, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Methods and assemblies for gas flow ratio control" was invented by Kevin Brashear (San Jose, Calif.), Ashley M. Okada (San Jose, Calif.), Dennis L. Demars (Santa Clara, Calif.), Zhiyuan Ye (San Jose, Calif.), Jaidev Rajaram (Bangalore, India) and Marcel E. Josephson (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A master controller identifies a flow ratio setpoint for at least one of a process gas or a carrier gas flow to a process chamber through a set of mass flow controllers. The master controller determines an amount of gas loss within the sy...